Control method, control system, and program
US7941232B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2006 |
| Grant date | May 10, 2011 |
| Priority date | — |
| Expiry date | Aug 24, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70641
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
By repeatedly executing a predetermined measurement at set intervals, data on a predetermined performance (a best focus position) of a predetermined apparatus and data on variation factors of the performance are obtained (Steps 204 to 214). Based on the obtained data, multivariate analysis is performed and a model equation that is used to predict a variation amount of the performance and includes at least one of the variation factors as a variable is derived (Step 214). Therefore, after deriving the model equation, a variation amount of the performance can be predicted using the model equation by obtaining data on the variation factor that serves as the variable (Step 238). Accordingly, it becomes possible to maintain the performance described above with good accuracy in accordance with the prediction results and also optimize the implementation timing of maintenance and the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.