Active vibration isolation system with a combined position actuator
US7942379B2 · kind B2 · utility
5Cited by
9References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 17, 2007 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | Feb 18, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
The invention relates to a vibration isolation system, comprising at least one fluid bearing having a first control device in order to control the fluid pressure and having at least one actuator in order to compensate for position changes of the load to be isolated, which actuator is controlled by at least one second control device, wherein the input of one control device is connected to the output of the other control device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.