Processes for purification of silicon tetrafluoride
US7943108B2 · kind B2 · utility
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7References
24Claims
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Key dates
| Filing date | Sep 11, 2008 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | Sep 11, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/584
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Processes for purifying silicon tetrafluoride source gas by subjecting the source gas to one or more purification processes including: contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a catalyst to remove carbon monoxide, by removal of carbon dioxide by use of an absorption liquid, and by removal of inert compounds by cryogenic distillation; catalysts suitable for removal of carbon monoxide from silicon tetrafluoride source gas and processes for producing such catalysts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.