Apparatus and method of sensing leakage of chemical liquid
US7944363B2 · kind B2 · utility
6Cited by
4References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 16, 2008 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | Jun 17, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8158
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.