Electromechanical device with optical function separated from mechanical and electrical function

US7944599B2 · kind B2 · utility

Assignee

• QUALCOMM MEMS Technologies, Inc. · US

Inventors

• Clarence Chui · San Jose, US
• William J. Cummings · Millbrae, US
• Brian J. Gally · Los Gatos, US
• Lior Kogut · Haifa, IL
• Ming-Hau Tung · San Francisco, US
• Yeh-Jiun Tung · Princeton, US
• Chih-Wei Chiang · Baoshan, TW
• Denis Endisch · Cupertino, US

Key dates

• Filing date: Jul 2, 2007
• Grant date: May 17, 2011
• Expiry date: Jan 25, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.