Hydrostatic bearing and stage apparatus
US7946767B2 · kind B2 · utility
1Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 7, 2008 |
| Grant date | May 24, 2011 |
| Priority date | — |
| Expiry date | Oct 9, 2029 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2380/18
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured to jet air onto the sliding surface; and a suction part having a suction surface configured to suction the air jetted from the jetting surface onto the sliding surface. The suction surface is situated at one of an internal circumferential side and an external circumferential side of the jetting part and is positioned higher than a lower end of the jetting part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.