Ryuta Nakajima
5Patents
1h-index
11Co-inventors
44Inventor score
Filing activity: Nov 14, 2007 → Sep 24, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8517363B2 | XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus | Electricity | 6 | Active |
| US7997567B2 | Stage apparatus | Physics | 1 | Active |
| US8019448B2 | Stage device | Physics | 1 | Active |
| US7946767B2 | Hydrostatic bearing and stage apparatus | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US11072508B2 | Control apparatus | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.