Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
US7947639B2 · kind B2 · utility
1Cited by
2References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 1, 2005 |
| Grant date | May 24, 2011 |
| Priority date | — |
| Expiry date | Jul 28, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/426
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Photoresist strippers and cleaning compositions of this invention are provided by non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor polymer having multiple hydroxyl- or amino-functional groups pendant from the polymer backbone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.