Low vibration rectification in a closed-loop, in-plane MEMS device
US7949508B2 · kind B2 · utility
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4Claims
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Key dates
| Filing date | Apr 6, 2010 |
| Grant date | May 24, 2011 |
| Priority date | — |
| Expiry date | Apr 6, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for a geometry of a lateral comb drive for an in-plane, electrostatic force feedback, closed-loop, micromachined accelerometer or closed-loop Coriolis rate gyroscope device, or closed-loop capacitive pressure or force measuring device. When vibration is applied to the device, the error in the time-average output, which is vibration rectification error, due to this input vibration is minimized or eliminated. The geometry resulting from practice of the present invention is space-efficient because drive force is maximized while vibration rectification is minimized or eliminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.