Temperature measuring apparatus and temperature measuring method
US7952717B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2008 |
| Grant date | May 31, 2011 |
| Priority date | — |
| Expiry date | Apr 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K11/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature measuring apparatus includes a light source, a first splitter, a second splitter, a reference beam reflector, an optical path length adjuster, a reference beam transmitting member, a first to an nth measuring beam transmitting member and a photodetector. The temperature measuring apparatus further includes a controller that stores, as initial peak position data, positions of interference peaks respectively measured in advance by irradiating the first to the nth measuring beam onto the first to the nth measurement point of the temperature measurement object, and compares the initial peak position data to positions of interference peaks respectively measured during a temperature measurement to thereby estimate a temperature at each of the first to the nth measurement point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.