Microactuator, optical device and exposure apparatus, and device manufacturing method
US7952780B2 · kind B2 · utility
4Cited by
14References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2009 |
| Grant date | May 31, 2011 |
| Priority date | — |
| Expiry date | Jan 5, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.