Method of making a semiconductor device with surge current protection
US7960198B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2007 |
| Grant date | Jun 14, 2011 |
| Priority date | — |
| Expiry date | Apr 2, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/548
Abstract
A wide bandgap semiconductor device with surge current protection and a method of making the device are described. The device comprises a low doped n-type region formed by plasma etching through the first epitaxial layer grown on a heavily doped n-type substrate and a plurality of heavily doped p-type regions formed by plasma etching through the second epitaxial layer grown on the first epitaxial layer. Ohmic contacts are formed on p-type regions and on the backside of the n-type substrate. Schottky contacts are formed on the top surface of the n-type region. At normal operating conditions, the current in the device flows through the Schottky contacts. The device, however, is capable of withstanding extremely high current densities due to conductivity modulation caused by minority carrier injection from p-type regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.