Pore phase change material cell fabricated from recessed pillar

US7960203B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Alejandro G. Schrott · New York, US
• Chung H. Lam · Williston, US
• Eric A. Joseph · White Plains, US
• Matthew J. Breitwisch · Yorktown Heights, US
• Roger W. Cheek · Somers, US

Key dates

• Filing date: Jan 29, 2008
• Grant date: Jun 14, 2011
• Expiry date: Jun 30, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N70/884

Abstract

A method of manufacturing an electrode is provided that includes providing a pillar of a first phase change material atop a conductive structure of a dielectric layer; or the inverted structure; forming an insulating material atop dielectric layer and adjacent the pillar, wherein an upper surface of the first insulating material is coplanar with an upper surface of the pillar; recessing the upper surface of the pillar below the upper surface of the insulating material to provide a recessed cavity; and forming a second phase change material atop the recessed cavity and the upper surface of the insulating material, wherein the second phase change material has a greater phase resistivity than the first phase change material.