eFuse with partial SiGe layer and design structure therefor
US7960809B2 · kind B2 · utility
8Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2009 |
| Grant date | Jun 14, 2011 |
| Priority date | — |
| Expiry date | Oct 29, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A fuse includes a fuse link region, a first region and a second region. The fuse link region electrically connects the first region to the second region. A SiGe layer is disposed only in the fuse link region and the first region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.