Process of making carbon nanotube array that includes impregnating the carbon nanotube array with metal
US7964447B2 · kind B2 · utility
2Cited by
6References
8Claims
0Family size
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Key dates
| Filing date | May 8, 2009 |
| Grant date | Jun 21, 2011 |
| Priority date | — |
| Expiry date | May 8, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carbon nanotube (CNT) array is patterned on a substrate. The substrate can be a microelectronic die or a heat sink for a die. The patterned CNT array is patterned by using a patterned catalyst on the substrate to form the CNT array by growing. The patterned CNT array can also be patterned by using a patterned mask on the substrate to form the CNT array by growing. A computing system that uses the CNT array for heat transfer from the die is also used.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.