Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method
US7969549B2 · kind B2 · utility
3Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2006 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Aug 15, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70958
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.