Laser direct imaging apparatus
US7969636B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 14, 2008 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Jan 1, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70383
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser direct imaging apparatus which can expose photosensitive materials having various sensitivities and which can correct an imaging position in accordance with deformation of a workpiece. In the laser direct imaging apparatus, the workpiece is moved in a sub-scanning direction while a cylindrical lens is used to converge a laser beam, which has been modulated based on raster data, in the sub-scanning direction and deflect the laser beam toward a main scanning direction so as to image a desired pattern on the workpiece. The cylindrical axis of the cylindrical lens is designed to be able to rotate horizontally and to be able to change an angle with respect to the main scanning direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.