Yoshitada Oshida
54Patents
18h-index
71Co-inventors
87Inventor score
Filing activity: May 28, 1976 → Aug 14, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5677755A | Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them | Physics | 102 | Expired |
| US5016149A | Illuminating method and illuminating apparatus for carrying out the same, and projection exposure method and projection exposure apparatus for carrying out the same | Physics | 67 | Expired |
| US4085423A | Information reproducing apparatus with plural beam readout | Physics | 62 | Expired |
| US4668089A | Exposure apparatus and method of aligning exposure mask with workpiece | Physics | 57 | Expired |
| US5302999A | Illumination method, illumination apparatus and projection exposure apparatus | Physics | 56 | Expired |
| US5684565A | Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system | Physics | 44 | Expired |
| US7217573B1 | Method of inspecting a DNA chip | Emerging Cross-Sectional Technologies | 43 | Expired |
| US4343553A | Shape testing apparatus | Physics | 42 | Expired |
| US4819033A | Illumination apparatus for exposure | Physics | 40 | Expired |
| US5227862A | Projection exposure apparatus and projection exposure method | Physics | 30 | Expired |
| US5329333A | Exposure apparatus and method | Emerging Cross-Sectional Technologies | 29 | Expired |
| US4473750A | Three-dimensional shape measuring device | Physics | 26 | Expired |
| US4553844A | Configuration detecting method and system | Physics | 25 | Expired |
| US7400753B2 | Biological sample optical measuring method and biological sample optical measuring apparatus | Physics | 25 | Expired |
| US7969636B2 | Laser direct imaging apparatus | Physics | 24 | Active |
| US5209813A | Lithographic apparatus and method | Electricity | 23 | Expired |
| US5008702A | Exposure method and apparatus | Physics | 23 | Expired |
| US4676637A | Exposure apparatus with foreign particle detector | Physics | 18 | Expired |
| US4922290A | Semiconductor exposing system having apparatus for correcting change in wavelength of light source | Physics | 18 | Expired |
| US4564296A | Plate thickness measuring method and apparatus | Physics | 16 | Expired |
| US4125859A | Videodisc play-back apparatus with variable width beam | Physics | 16 | Expired |
| US6760105B2 | Method and apparatus for inspecting DNA and method for detecting fluorescence | Physics | 16 | Expired |
| US4862008A | Method and apparatus for optical alignment of semiconductor by using a hologram | Physics | 15 | Expired |
| US4725737A | Alignment method and apparatus for reduction projection type aligner | Physics | 15 | Expired |
| US4458302A | Reflection type optical focusing apparatus | Physics | 14 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.