Optical positioner design in X-ray analyzer for coaxial micro-viewing and analysis
US7972062B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2009 |
| Grant date | Jul 5, 2011 |
| Priority date | — |
| Expiry date | Dec 28, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An X-ray analyzer includes a sample stage for holding and positioning a sample and an optical positioner assembly configured above the sample stage. The optical positioner assembly includes a body member having an opening; an optical positioner located within the opening; and at least one X-ray optic and an optical viewing lens coupled to a first camera. The at least one X-ray optic and the optical viewing lens are secured to the optical positioner. The optical positioner is configured to align one of the at least one X-ray optic and the optic viewing lens normal to the sample on the sample stage such that the sample is irradiated with X-rays through the X-ray optic along a path which is normal to the sample and coaxial with the optic viewing lens receiving light reflected from the sample when the optic viewing lens is positioned normal to the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.