Patent · US Active

Middle layer of die structure that comprises a cavity that holds an alkali metal

US7973611B2 · kind B2 · utility

1Cited by

4References

10Claims

0Family size

Assignee

NORTHROP GRUMMAN GUIDANCE AND ELECTRONICS COMPANY, INC. · US

Inventors

Henry C. Abbink · Westlake Village, US
William P. Debley · San Fernando, US
Christine Geosling · Calabasas, US
Daryl K. Sakaida · Simi Valley, US
Robert E. Stewart · Calabasas, US

Key dates

Filing date	Sep 11, 2007
Grant date	Jul 5, 2011
Priority date	—
Expiry date	Sep 11, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG04F5/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus in one example comprises a die structure that comprises a middle layer, a first outside layer, and a second outside layer. The middle layer comprises a cavity that holds an alkali metal, and one of the first outside layer and the second outside layer comprises a channel that leads to the cavity. The middle layer, the first outside layer, and the second outside layer comprise dies from one or more wafer substrates.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.