Infrared imaging using thermal radiation from a scanning probe tip
US7977636B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 12, 2008 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Jul 14, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/58
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.