Patent · US Active

System and method for determining positions of structures on a substrate

US7978340B2 · kind B2 · utility

1Cited by

6References

7Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Hans-Artur Boesser · Breidenbach, DE
Wolfgang Fricke · Netphen, DE
Michael Heiden · Blieskastel, DE

Key dates

Filing date	Jul 31, 2008
Grant date	Jul 12, 2011
Priority date	—
Expiry date	Nov 12, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70616
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system and a method for determining positions of structures on a substrate are disclosed. The system includes at least one measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, a measurement objective (9) and a camera for determining the positions of the structures (3) on the substrate (2). The position of the measurement objective (9) and/or the measurement table (20) may be determined by at least one interferometer (24). The system is surrounded by a housing representing a climatic chamber (50) provided with an active pressure regulation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.