Foreign matter inspection method and foreign matter inspection apparatus
US7986405B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2010 |
| Grant date | Jul 26, 2011 |
| Priority date | — |
| Expiry date | Apr 12, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8825
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.