Thermally stable multilayer mirror for the EUV spectral range

US7986455B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Torsten Feigl · Jena, DE
• Nicolas Benoit · Gießen, DE
• Sergiy Yulin · Jena, DE
• Nobert Kaiser · Jena, DE

Key dates

• Filing date: Aug 8, 2008
• Grant date: Jul 26, 2011
• Expiry date: Aug 8, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/067
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.