Patent · US Active

In-plane sensor and method for making same

US7989247B2 · kind B2 · utility

1Cited by

3References

10Claims

0Family size

Assignee

PIXART IMAGING INC. · TW

Inventors

Chuan-Wei Wang · Hsinchu, TW
Sheng-Ta Lee · Hsinchu, TW

Key dates

Filing date	Jul 29, 2008
Grant date	Aug 2, 2011
Priority date	—
Expiry date	Feb 20, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.