Cylindrical target with oscillating magnet for magnetron sputtering
US7993496B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 30, 2005 |
| Grant date | Aug 9, 2011 |
| Priority date | — |
| Expiry date | Sep 22, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3497
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In some embodiments, the invention includes a cylindrical cathode target assembly for use in sputtering target material onto a substrate that comprises a generally cylindrical target, means for rotating the target about its axis during a sputtering operation, an elongated magnet carried within the target for generation of a plasma-containing magnetic field exterior to but adjacent the target, a framework for supporting the magnet against rotation within the target, and a power train for causing the magnet to oscillate within and axially of the target in a substantially asynchronous manner to promote generally uniform target utilization along its length, as well as its method of use. In some embodiments, the magnet is oscillated in response to rotation of the target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.