Stage apparatus
US7997567B2 · kind B2 · utility
1Cited by
2References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 2007 |
| Grant date | Aug 16, 2011 |
| Priority date | — |
| Expiry date | Oct 4, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70758
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stage apparatus, includes a holding member configured to hold a subject; an elevation supporting member configured to support the holding member so that the holding member can go up and down; a rotation supporting member configured to support the elevation supporting member so that the elevation supporting member can be rotated with respect to a Z axis; and a Z axis driving part configured to elevate the holding member in a Z axial direction; wherein the Z axis driving part is located on the rotation supporting member and makes the holding member go up and down relative to the rotation supporting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.