High precision posture control method of X-ray mirror
US8000443B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 17, 2007 |
| Grant date | Aug 16, 2011 |
| Priority date | — |
| Expiry date | Dec 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/10
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A high precision posture control method for sustaining the posture of an X-ray optical element constantly at 1 μrad or less. A longitudinal condensation mirror and a lateral condensation mirror, each having a condensation plane band consisting of an elliptical reflective surface, are arranged perpendicularly to each other to form a K-B mirror arrangement. Fresnel mirrors are respectively constituted of a pair of planar reflective surfaces formed in the vicinities of the incident side end and the exit side end of the condensation plane band of each condensation mirror. Interference fringe by the Fresnel mirror of each condensation mirror is independently monitored at a position insusceptible to a condensation beam by the condensation plane band, and variation in interference fringe is detected electrically and its detection signal is used as a feedback signal for posture control of each condensation mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.