Apparatus and methods for ambient air abatement of electronic manufacturing effluent
US8003067B2 · kind B2 · utility
6Cited by
15References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2008 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Sep 24, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02W10/37
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.