Micro-electro-mechanical system device and method for making same
US8003422B2 · kind B2 · utility
6Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2008 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Oct 2, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0257
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
According to the present invention, a micro-electro-mechanical system (MEMS) device comprises: a thin film structure including at least a metal layer and a protection layer deposited in any order; and a protrusion connected under the thin film structure. A preferred thin film structure includes at least a lower protection layer, a metal layer and an upper protection layer. The MEMS device for example is a capacitive MEMS acoustical sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.