Automatic focus adjusting mechanism and optical image acquisition apparatus
US8004655B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 23, 2010 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Mar 23, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B13/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In an automatic focus adjusting mechanism, a test sample having a patterned surface is mounted on a mount table, and an light beam passing through a slit formed in a field stop is applied to the patterned surface of the test sample. The light beam reflected from the test sample is split into two segment light beams. Focus adjusting aperture stops having respective apertures formed rhomboid are provided across the optical paths of the segment light beams. The amounts of the segment light beams passing through the rhomboid apertures are detected by light receiving units. Based on the difference between the detected light amounts, the position of the mount table is controlled by the focus adjusting unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.