Shape measuring apparatus and shape measuring method
US8006402B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2009 |
| Grant date | Aug 30, 2011 |
| Priority date | — |
| Expiry date | Apr 13, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/045
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle θ of the stylus displacement vector D that is caused by a frictional force between a stylus 32 and the measuring surface 5a during scanning of the measuring surface 5a by the stylus 32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus 32 relative to the probe 5. Movement of an XY-stage 7 is controlled so that the probe 6 moves in accordance with the moving vector M.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.