Optical imaging device having at least one system diaphragm

US8009343B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Bernhard Gellrich · Aalen, DE
• Thomas C. Bischoff · Buxtehude, DE
• Hermann Bieg · Wertingen, DE
• Martin Huber · Uttenreuth, DE
• Francois Henzelin · Boncourt, CH
• Gerhard Szekely · Wetzikon, CH
• Uy-Liem Nguyen · Wetzikon, CH
• Martin E. Humphries · Bristol, GB

Key dates

• Filing date: Jul 2, 2004
• Grant date: Aug 30, 2011
• Expiry date: Oct 29, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/7025
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical imaging device (PL), in particular an objective for semiconductor lithography, is provided with at least one system diaphragm. The system diaphragm comprises a multiplicity of mobile plates, which are rotatably mounted. The plates have a spherical curvature.