Scanning probe microscope
US8011230B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2008 |
| Grant date | Sep 6, 2011 |
| Priority date | — |
| Expiry date | Jun 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.