Patent · US Active

Multistage proof-mass movement deceleration within MEMS structures

US8011247B2 · kind B2 · utility

6Cited by
26References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 26, 2008
Grant dateSep 6, 2011
Priority date—
Expiry dateJan 7, 2030

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2201/0235
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A micro-electromechanical systems (MEMS) device includes a substrate comprising at least one anchor, a proof mass having first and second deceleration extensions extending therefrom, a motor drive comb, a motor sense comb, a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb. The suspensions are anchored to the substrate. A body is attached to the substrate. At least one deceleration beam extends from a first side of said body. The at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.