Patent · US Active

Balanced purge slit valve

US8011381B2 · kind B2 · utility

22Cited by

8References

22Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Jacob Newman · Palo Alto, US
Douglas H. Burns · Saratoga, US

Key dates

Filing date	Oct 2, 2008
Grant date	Sep 6, 2011
Priority date	—
Expiry date	Dec 11, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T137/4259
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Methods and apparatus for providing a gas to a slit valve opening are provided herein. In one embodiment, a slit valve is described. The slit valve includes a housing having an opening, the opening defined by a plurality of interior sidewalls and sized to allow a substrate to pass therethrough, a door adapted to selectively seal the opening, a gas inlet formed in the housing, and a plurality of nozzles disposed in or on at least one of the plurality of interior sidewalls, each of the plurality of nozzles in fluid communication with the gas inlet and the opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.