Patent · US Active

Method for forming stackable semiconductor device packages including openings with conductive bumps of specified geometries

US8012797B2 · kind B2 · utility

137Cited by
74References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 25, 2009
Grant dateSep 6, 2011
Priority date
Expiry dateAug 25, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3511
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In one embodiment, a manufacturing method includes: (1) applying a first electrically conductive material to an upper surface of a substrate to form first conductive bumps; (2) electrically connecting a semiconductor device to the upper surface of the substrate; (3) applying a molding material to form a molded structure covering the first conductive bumps and the semiconductor device, upper ends of the first conductive bumps being recessed below an upper surface of the molded structure; (4) forming openings adjacent to the upper surface of the molded structure, the openings exposing the upper ends of the first conductive bumps; (5) applying, through the openings, a second electrically conductive material to form second conductive bumps; and (6) forming cutting slits extending through the molded structure and the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.