Antireflective coating composition comprising fused aromatic rings
US8017296B2 · kind B2 · utility
6Cited by
41References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2007 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | May 14, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0276
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.