Color filter array alignment mark formation in backside illuminated image sensors
US8017426B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 9, 2008 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Jul 12, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/16225
Abstract
A backside illuminated image sensor includes a sensor layer comprising photosensitive elements of the pixel array, an epitaxial layer formed on a frontside surface of the sensor layer, and a color filter array formed on a backside surface of the sensor layer. The epitaxial layer comprises polysilicon color filter array alignment marks formed in locations corresponding to respective color filter array alignment mark openings in the frontside surface of the sensor layer. The color filter array is aligned to the color filter array alignment marks of the epitaxial layer. The image sensor may be implemented in a digital camera or other type of digital imaging device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.