Patent · US Active

Termination trench structure for mosgated device and process for its manufacture

US8017494B2 · kind B2 · utility

1Cited by
4References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 25, 2008
Grant dateSep 13, 2011
Priority date—
Expiry dateJan 25, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/252

Abstract

A process for the fabrication of a MOSgated device that includes a plurality of spaced trenches in the termination region thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.