Housing structure

US8018664B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Stefan Xalter · Oberkochen, DE
• Peter Deufel · Oberkochen, DE
• Yim-Bun Patrick Kwan · Aalen, DE
• Bernard Stommen · Eindhoven, NL
• Herman Soemers · Mierlo, NL
• Franz Van Deuren · Valkenswaard, NL
• Paul Peter Anna Antonius Brom · Eindhoven, NL

Key dates

• Filing date: Apr 20, 2004
• Grant date: Sep 13, 2011
• Expiry date: Jan 6, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70808
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6′. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6′ and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.