Stage device
US8019448B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2008 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Dec 13, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41148
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The vibrations of a second table supported on a first table that is movable in one horizontal direction can be controlled. A stage device includes an XY axis table movable in the X-direction, a Z-axis table supported by a support portion on the XY axis table, a pair of scales that are arranged apart from each other in the X-direction and detect the Z-direction velocity on the Z-axis table, a pair of motors that are arranged apart from each other in the X-direction and drive the Z-axis table in a vertical direction on the Z-axis-table, and a controller controls the drives of the motors based on the Z-direction velocity detected, in which the behavior of pitching vibrations in the Z-axis table is determined by detecting the Z-direction velocity with the scales, and the motors are driven and then the Z-axis table is rotated in a pitching direction so that the pitching vibrations are cancelled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.