Patent · US Active

Stripper for coating layer

US8026201B2 · kind B2 · utility

3Cited by
4References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 3, 2007
Grant dateSep 27, 2011
Priority date—
Expiry dateDec 30, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/426
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The invention relates to compositions and methods of removing silicon-based anti-reflective coatings/hardmask layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.