Method and device for producing exposed structures

US8027018B2 · kind B2 · utility

Assignee

• KLEO Halbleitertechnik GmbH & Co KG · DE

Inventors

• Hans Opower · Krailling, DE
• Stefan Scharl · Günzburg, DE
• Dirk Leinenbach · Habach, DE

Key dates

• Filing date: Mar 2, 2005
• Grant date: Sep 27, 2011
• Expiry date: Feb 21, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70425
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In order to improve a method for producing exposed structures on a plurality of components by means of an exposure unit, with which substrate member and the exposure unit are moved relative to one another, wherein identical structures are produced on at least some of the components, in such a manner that this operates as efficiently as possible it is suggested that each of the identical structures be produced by way of exposure of the substrate member in the area of the component respectively provided within a plurality of macrolines, that each of the macrolines comprise a plurality of lines lying next to one another, that during a single pass along a path of exposure all the components covered by this path of exposure be exposed with the exposure unit in the area of the same macroline of the plurality of macrolines, that the exposure unit have a plurality of light sources and a control with a control memory, with which sets of data already stored for the macroline, in the area of which exposure is being carried out, can be read out while sets of data of an additional macroline are being stored.