Patent · US Active

Catadioptric projection objective with tilted deflecting mirrors, projection exposure apparatus, projection exposure method, and mirror

US8027088B2 · kind B2 · utility

5Cited by

2References

32Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Ralf Mueller · Germersheim, DE
Aksel Goehnermeier · Aalen, DE
Wolfgang Singer · Aalen, DE

Key dates

Filing date	Dec 26, 2007
Grant date	Sep 27, 2011
Priority date	—
Expiry date	Feb 19, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/286
WIPO fieldOptics
WIPO sectorInstruments

Abstract

In general, in one aspect, the invention features a catadioptric projection objective having a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective. The optical elements include a concave mirror, a first deflecting mirror tilted relative to the optical axis and a second deflecting mirror. The catadioptric projection objective can image patterns including sub-patterns oriented in various directions such that line width variations due to differences of orientation of sub-patterns are largely avoided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.