Apparatus and method for testing a panel of interferometric modulators
US8027800B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2008 |
| Grant date | Sep 27, 2011 |
| Priority date | — |
| Expiry date | May 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/302
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In some embodiments, each interferometric modulator has a stiction threshold voltage. If a voltage above the stiction threshold voltage is applied to the interferometric modulator, the interferometric modulator enters a stiction state permanently, i.e., becomes “stuck,” and the interferometric modulator becomes inoperable. Disclosed are apparatuses, methods and computer-readable media for testing a panel of interferometric modulators. A ramped voltage waveform is applied to a plurality of interferometric modulators of the panel. In response to applying the ramped voltage, the stiction threshold voltage is identified. At or above this voltage, the number of stuck interferometric modulators in the panel reaches or exceeds a first threshold number, for example, 50% of the total number of the interferometric modulators constituting the panel. The embodiments can be used to establish stiction benchmark for panel manufacturing processes, to collect data for generating statistical distribution, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.