Semiconductor devices testing apparatus with temperature-adjusting design
US8035405B2 · kind B2 · utility
4Cited by
7References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2009 |
| Grant date | Oct 11, 2011 |
| Priority date | — |
| Expiry date | Dec 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probing apparatus includes a housing, a device holder positioned in the housing and configured to receive a device under test, a temperature-controller positioned in the device holder, a platen positioned on the housing and configured to retain at least one probe, and a flow line positioned in the platen, wherein the flow line is configured to flow a fluid therein to adjust the temperature of the platen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.