Method and apparatus for fluid processing a workpiece
US8038856B2 · kind B2 · utility
5Cited by
2References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 2010 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | May 24, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.