Thin film getter protection
US8039285B2 · kind B2 · utility
2Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2006 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Jan 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for installing a sorption element in a cavity including: disposing, within the cavity, a getter material, a reaction material, and a protective material, the protective material covering at least one part of the getter material so as to bury the at least one part; raising a temperature up to at least one removal temperature; and moving the protective material towards the reaction material by reaction between the protective material and the reaction material so that at least one portion of the part of the getter material is no longer covered with the protective material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.