Variable capacitor employing MEMS technology
US8039922B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 24, 2009 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Apr 26, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G5/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
When a positive voltage of V1 is applied to a drive capacitor with a braking voltage V2 at 0V, a moveable electrode moves toward the drive electrode, and a capacitance C of a tunable capacitor becomes smaller. When the braking voltage V2 is applied a lower portion brake electrode of the brake capacitor moves in a horizontal direction, such that the inter electrode separation distance between an upper portion brake electrode and the lower portion brake electrode becomes 0 μm. The moveable electrode configured integrally formed with the lower portion brake electrode also moves in the horizontal direction, and the inter electrode separation distance between the moveable electrode and a fixed electrode becomes 0 μm. Since the two electrodes make contact with each other with a dielectric layer interposed therebetween, the position of the moveable electrode can be stably maintained by frictional force between the electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.